IDP Type Chemical Mechanical Polishing Machine
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Price:
Negotiable
- minimum:
- Total supply:
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Delivery term:
The date of payment from buyers deliver within days
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seat:
Beijing
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Validity to:
Long-term effective
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Last update:
2023-09-21 00:03
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Browse the number:
169
Company Profile
Shanghai Leading Semiconductor Technology Development Co., Ltd.By certification [File Integrity]
Contact:zhiling2023(Mr.)
Email:
Telephone:
Phone:
Area:Beijing
Address:Beijing
Website:http://www.lstd-cn.com/ http://zhiling2023.oesnetwork.com/
Product Details
Each pressure plate of CP series chemical mechanical polishing machine with independent driving of pressure plate is driven by a separate servo reducer. Unlike the way that the central guide roller driven CP machine is driven by friction, the pressure plate independent driving CP machine can realize accurate speed control of pressure plate. At the same time, due to the structure of avoiding friction contact in the polishing area, the generation of crystal particles of polishing slurry is reduced, Thus, the probability of particle pollution and scratch on the surface of the wafer is reduced; The rotating speed of each pressure plate of IDP machine can be set separately. According to the characteristics of the pressurizing cylinder of each pressure plate, the processing results in almost zero difference between different pressure plates can be achieved by fine adjustment of the rotating speed of the pressure plates.
For IDP machines with large size, positioning and station switching of ceramic plates can be realized by adding internal and external guide rollers devices, so as to realize the loading and unloading in one station. It can also realize the connection of multiple machines by integrating manipulator to form an automatic production line.
IDP TYPE CP series chemical mechanical polishing machine
Type and spec |
CP-380B-IDP |
CP-460B-IDP |
CP-610B-IDP |
CP-810B-IDP |
Polishing Plate diameter |
381mm |
460mm |
610mm |
812mm |
Pressure plate diameter |
139mm |
150mm |
240mm |
304.8mm |
No. of pressure plate |
3 |
3 |
4 |
4 |
Polishing plate RPM |
10~160rpm |
10~160rpm |
10~115rpm |
10~87rpm |
Polishing pressure(max.) |
100kg |
100kg |
140kg |
250kg |
Pressure plate driven Motor power |
200W |
200W |
400KW |
400KW |
Pressure plate rotation speed |
0~200rpm |
0~200rpm |
0~100rpm |
0~100rpm |
Main Motor power |
0.75kw |
1.5kw |
3kw |
5.5KW |
Power supply |
3PH,380V,50Hz |
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Dimension |
950L 770W 1560H |
1100L 850W 1650H |
1350L 900W 1700H |
1600L 920W 1900H |
Weight ( Approx..) |
350kg |
350kg |
980kg |
1800kg |
Wafer loading capacity |
2"-4pcs/head |
2"-4pcs/head |
2"-10pcs/head 4"-3pcs/head |
2"-14pcs/head 4"-5pcs/head 5"-3pcs/head |
Type and spec |
CP-910B-IDP |
CP-1280B-IDP |
CP-1500B-IDP |
Polishing Plate diameter |
914mm |
1282mm |
1500mm |
Pressure plate diameter |
360mm |
485mm |
576mm |
No. of pressure plate |
4 |
4 |
4 |
Polishing plate RPM |
10-80rpm |
10~64rpm |
10-54rpm |
Polishing pressure(max.) |
320kg |
560kg |
760kg |
Pressure plate driven Motor power |
2KW |
1KW |
1.3KW |
Pressure plate rotation speed |
2KW |
0~100rpm |
0~100rpm |
Main Motor power |
11kw |
22kw |
35kw |
Power supply |
3PH,380V,50Hz |
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Dimension |
1800L 1262W 2120H |
2180L 1670W 2200H |
2800L 2020W 2500H |
Weight ( Approx..) |
2200kg |
7000kg |
8600kg |
Wafer loading capacity |
4"-7pcs/head 5"-5pcs/head 6"-3pcs/head |
5"-8pcs/head 6"-6pcs/head 8"-3pcs/head |
6"-8pcs/head 8"5pcs/head |
http://www.lstd-cn.com/
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